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Silicon carbide integrated boat support

碳化硅一体舟托

Silicon carbide integrated boat support

Description

Product Material: Silicon Carbide
Product structure form: Integrated sintering molding
Product usage: Automatic loading and unloading machines for online diffusion/annealing/LPVD, and transportation vehicles for silicon wafer flower baskets

Parameter
  • Length * Width * Height2140mm*300mm*200mm
  • Temperature Resistance1200℃
  • Number of basket clamps 10-20
  • Maximum load weight120kg
Advantage
  • Excellent dimensional accuracy and consistency, tolerance level 0.1mm
  • High structural strength, durable, not easy to break
  • Resistant to strong acids and alkalis, withstanding more than 50 cycles