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SIC Boat
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SIC Boat
Datasheet
Description
Material: SIC
Application: To carry wafers, can be used for diffusion/oxidation/LPCVD system.
Parameter
LxWxH
320mmx185mmx293.9mm
Temperature Resistance
< 1200°C
Wafer Capacity
102
Advantage
High temperature and corrosion resistance
High structural strength, durable, not prone to fracture
Lifetime：>12 months
Customizable
