Search
Close this search box.

Heating Element

Heating Element

Heating Element

Description

LAPLACE heating element is customized for photovoltaic processing, adapting special techniques for ensuring superior temperature uniformity and product consistency, suitable for diffusion, oxidation, LPCVD, PECVD, and other models.

Parameter
  • Compatible quartz tube dimension430-540mm
  • Temperature zones≥6
  • Segmentation≥4
  • Flatzone≤2700mm
  • Peak ramp up20°C/min
  • Peak ramp down5°C/min
  • Temperature precision±1°C/4h
  • Temperature range≤1100°C
  • Lifetime≥1years
Advantage
  • Superior temperature uniformity andan long flatzone
  • No temperature overshoot
  • Shorter temperature ramp and cooling time
  • Higher temperature application, minimal deformation, and longer lifetime
  • No need for transformer,flexible temperature control
  • Superior insulation material for better heat energy conservation