Heating Element

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Heating Element

Description

Coarse FeCrAl heating wire is used as the heating element, which has excellent temperature uniformity, product consistency and long service life; it is suitable for diffusion, oxidation, LPCVD, PECVD and other models.

Parameter
  • Compatible quartz tube dimension430-540mm
  • Temperature zones≥26
  • Segmentation≥4
  • Flatzone≤2700mm
  • Peak ramp up20°C/min
  • Peak ramp down5°C/min
  • Temperature precision1°C/4h
  • Temperature range≤1100°C
  • Lifetime≥ 1 year
Advantage
  • The entire production process does not emit any special chemicals or harmful gases
  • Ceramic fiber has the advantages of light weight, good thermal insulation, good thermal stability, good chemical stability, and convenient construction
  • The addition of ceramic washers increases the consistency and reliability under cycle temperature