The main function of the quartz boat automation equipment is to automatically take out the silicon wafers in the quartz boat after the process and put them into the cassette, and automatically take out the silicon wafers that have not been processed from the cassette and put them into the quartz boat. It is stable and reliable, and can be used with all main equipment on the market. It is compatible with sizes of 182-230mm, and can reach 99% uptime and 0.02% breakage rate.Read more
The main function of the texturing loading and unloading automation equipment is to import the stacked raw silicon wafers into the process cassette, and send the full cassette filled with raw silicon wafers into the host; after the process, the full cassette is moved out of the host and docked with the AGV. Stable and reliable, can be used with all main equipment on the market, compatible with sizes 182-230mmRead more
Main functions of aluminum boat (ALD) automation: Automatically take out the silicon wafers in the aluminum boat after process treatment and put them into the cassette, and automatically take out the silicon wafers that have not been processed from the cassette and put them into the aluminum boat. It is stable and reliable, and compatible with sizes of 182-230mm. The edge trimmer consists of two single sides, and the two single sides operate independently without affecting each other.Read more
The main function of graphite boat (PE) automation is to automatically take out the silicon wafers in the graphite boat after the process and put them into the cassette, and automatically take out the silicon wafers that have not been processed from the cassette and put them into the graphite boat. It can be used with all main equipment on the market, stable and reliable, compatible with sizes of 182-230mmRead more
The main function of the batch inline integrated loading and unloading automation equipment is to connect the Batch and Inline hosts, entering the Batch host after the silicon wafers in the cassette are laid flat; after the Batch process, the wafers are introduced into the process cassette again, and the full cassette is sent to the Inline host; after the Inline process, the full cassette is moved out of the host and connected to the AGV. Stable and reliable, can be used with all main equipment on the marketRead more
