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Core Components

Core Components

  • 碳化硅一体舟托

    Silicon carbide integrated boat support

    Product material: Silicon carbide; Product structure: integrated sintering molding; Product use: automatic loading and unloading automation such as online diffusion/annealing/LPCVD, and transportation carriers for silicon wafer cassetteRead more
  • SIC Boat

    SIC Boat

    Product material: Silicon carbide; Product structure: One-piece sintering; Product use: Automatic loading and unloading machine for online diffusion/annealing/LPCVD, carrying silicon wafersRead more
  • SiC Jig

    SiC Jig

    Product material: Silicon carbide; Product structure: Split sintering molding, adhesive splicing assembly; Product use: Automatic loading and unloading automation such as online diffusion/annealing/LPCVD, and transportation carriers for silicon wafer cassetteRead more
  • 粗丝热场

    Heating Element

    Use coarse FeCrAl heating wire as the heating element, which has excellent temperature uniformity, product consistency and long service life; suitable for diffusion, oxidation, LPCVD, PECVD and other models.Read more
  • Heating Element

    Heating Element

    LAPLACE thermal field is specially customized for photovoltaic thermal process equipment. It adopts an integrated vacuum absorption process and uses hard filaments as the heating body. It has excellent temperature uniformity and product consistency. It is suitable for diffusion, oxidation, LPCVD, PECVD and other models.Read more
  • Coated Quartz Tube

    Coated Quartz Tube

    The coated quartz tube is prepared by nano-crystallization technology, and the product's temperature resistance, thermal shock resistance, and corrosion resistance are significantly improved. It is suitable for thermal process equipment in photovoltaic cell production linesRead more