LAPLACE heating element is customized for photovoltaic processing, adapting special techniques for ensuring superior temperature uniformity and product consistency, suitable for diffusion, oxidation, LPCVD, PECVD, and other models.
Parameter
Compatible quartz tube dimension430-540mm
Temperature zones≥6
Segmentation≥4
Flatzone≤2700mm
Peak ramp up20°C/min
Peak ramp down5°C/min
Temperature precision±1°C/4h
Temperature range≤1100°C
Lifetime≥1years
Advantage
Superior temperature uniformity andan long flatzone
No temperature overshoot
Shorter temperature ramp and cooling time
Higher temperature application, minimal deformation, and longer lifetime
No need for transformer，flexible temperature control
Superior insulation material for better heat energy conservation
