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ALD Load-and-Unload Automation

ALD Load-and-Unload Automation

ALD Load-and-Unload Automation

Parameter
  • ModelLADA22000RL
  • Throughput22000PCS/H(@182),20000PCS/H(210)
  • ApplicableALD load-and-unload automation
  • Uptime≥99%
  • Breakage≤0.03%
  • Dimension16900mm*6800mm*4400mm(inclusive of main tool)
  • Wafer SizeCompatible with 182-230 various wafer sizes
  • OptionalIncoming cassette wafer breakage detection
Highlights
  • Contact parts such as suction cups, stoppers made of special materials and processing techniques to reduce damage on the silicon wafer
  • Maintenance friendly simple and spacious internal layout design
  • Compatible with manual and AGV load -and-unload, optional MES function.
  • High tolerance with warped cells, suitable for BC solar cells