Highlights

• Matured technology, high quality yield, copy-and-paste duplication with ease
• Double loading performance as good as single loading
• Innovative 4 segment thermal field, equipped with ATS system for better temperature control accuracy
• Multi gas injection design for better film uniformity
• Nano-coated quartz tube for longer tube lifetime
• No metal parts within tube, improving process tability
• Fully automated intelligent control system
• Thicker pump exhaust piping for less maintenance hassle
• One-click temperature self-tuning function for easier tuning