Coarse FeCrAl heating wire is used as the heating element, which has excellent temperature uniformity, product consistency and long service life; it is suitable for diffusion, oxidation, LPCVD, PECVD and other models.
Parameter
Compatible quartz tube dimension430-540mm
Temperature zones≥26
Segmentation≥4
Flatzone≤2700mm
Peak ramp up20°C/min
Peak ramp down5°C/min
Temperature precision1°C/4h
Temperature range≤1100°C
Lifetime≥ 1 year
Advantage
The entire production process does not emit any special chemicals or harmful gases
Ceramic fiber has the advantages of light weight, good thermal insulation, good thermal stability, good chemical stability, and convenient construction
The addition of ceramic washers increases the consistency and reliability under cycle temperature
