Highlights

• High capacity with double loading
• Innovative 4 segment heater + ATS system for better temperature control
• Door flange with purge-ring design for longer maintenance cycle
• New water-cooled furnace door system
• New cooling purification area
• Fully automatic intelligent control system
• One-click temperature auto tuning function
• New automatic purge mode to improve pump and consumable parts maintenance cycles

Deposition Result